Currently work as a Thin Film Process Development Engineer at Macronix in Hsinchu. As a sponsor for the dielectric film process, my tasks include improving the dielectric film process for R&D products, such as applying new process or new equipment, or improving defects, throughput, film properties… etc. This work involves design and complete DOE (Design of Experiments) of different processes, and also handling daily troubleshooting for various thin film process(PVD, CVD) or CMP process, and product/equipment issues. I have developed good learning, problem-solving skills and strong ability to handle issue pressure during my experiences. I hope these abilities will contribute to my future work.
Dielectric Film Process
Thin Film(PVD,CVD) and CMP Process
Semiconductor Process
Offline Meas: SEM,TEM,XRDetc
Inline Meas: OCD Spectrum Fitting, recipe setup and training
Mechanical Properties Measurement