Meng-Yen Ku
Hsinchu County
Summary
Lithography R&D engineer focused on process development for memory and ASICs across different tech. nodes. Expertise in ASML scanner & TEL track for 10 years.
Experience in participating 2 new Fab's construction, which includes machine inspection and entry-level engineer training.
In charge of Fab's photoresists and masks quality control and management.
Overview
12
12
years of professional experience
Work History
Senior Engineer
TSMC
07.2021 - Current
- Participating in the construction of Advanced packaging Fab: AP6 SoIC.
- Independently completed machine inspection for 2 main process & 2 Metrology tools.
- Led engineers to complete machine inspection for 3 main process and 4 Metrology tools.
- Mentored and coached 5 entry-level engineers to improve talent and boost skill levels.
- In charge of Lithography tool recipe management.
- In charge of Fab's mask quality control, 2nd mask pi-run and management.
- Completed Litho process CIPs: 2 (defect improvement)
Senior Engineer
TSMC
07.2019 - 07.2021
- Participating in the construction of Advanced tech Fab: F18, N5/N5P.
- Independently completed machine inspection for 1 main process tool.
- In charge of advanced process photoresists(*46) quality management & control and new batch pre-qual(*12).
- Completed photoresist pre-qual process optimization for cost reduction, 300M/Y.
- Completed photoresists CIPs: 2 (vendor new process or new materials)
Engineer
TSMC
11.2011 - 07.2019
- Memory and mainstream lithography process development: C013, N65, N55, N40
- Based on the definition of customer's new product design, conducted assessment, development, and implementation of new manufacturing process technologies.
- Successfully completed technology transfer with 4 tech. generations and 3 product types.
- Collaborated closely with PID, OPC team, and other modules to develop highly reliable and mass-producible processes.
- Troubleshooting and resolving issues during new product pilot production.
- Introducing and evaluating new process materials.
- Deliver technology transfer documents(PRS) and trade secret."
Education
Master of Science - Electrophysics
National Chiao Tung University
Hsinchu, Taiwan06.2010
Bachelor of Science - Electrophysics
National Chiao Tung University
Hsinchu, Taiwan06.2008
Skills
- Process Development
- Specification Writing
- Risk Analysis
- Technical Reporting
- Staff Training
- Engineering Studies
- Project Management & Coordination
- Experience Using LabView, Laker, SolidWorks, Mathematica
Languages
Chinese (Mandarin)
Native language
English
Advanced
C1
Japanese
Elementary
A2
Timeline
Senior Engineer
TSMC
07.2021 - Current
Senior Engineer
TSMC
07.2019 - 07.2021
Engineer
TSMC
11.2011 - 07.2019
Master of Science - Electrophysics
National Chiao Tung University
Bachelor of Science - Electrophysics
National Chiao Tung University
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