Yuan Ming Chiu
Dry Etching Module Process Engineer
Hsinchu
Summary
Seasoned Deputy Technical Manager and Principal Engineer with a proven track record at Hitachi High-Tech and TSMC, specializing in semiconductor dry etch process design and optimization. Understanding plasma physics and plasma simulation to assist etching model build up. Expert in recipe tuning and adept at analytical thinking for problem-solving, significantly enhancing production efficiency and innovation.
Overview
12
12
years of professional experience
Work History
Deputy Technical Manager
Hitachi High-Tech Taiwan Corporation
02.2023 - Current
- Development of ECR plasma simulation.
- Dry etcher optimization and benchmark.
- Recommendations of customers thinking to company
- Machine learning for recipe optimization tuning.
Principal Engineer
Taiwan Semiconductor Manufacturing Company (TSMC)
09.2012 - 01.2023
- Module RD Engineer (ME) for N16 MGEB (Metal Gate Etching Back) in R&D Process Center (RDPC), 2012-2015
- Process RD Engineer (PE) for N7 MPG (Multi-Patterning Gate) in Advanced Tool and Module Development (ATMD), 2015-2018
- Process RD Engineer (PE) for N3 MPG (Multi-Patterning Gate) in Advanced Tool and Module Development (ATMD), 2018-2022
Education
Ph.D. - Energy-Thermofluids, Mechanical Engineering
National Chiao Tung University (NCTU)
Hsinchu, Taiwan 04.2001 -
M.D. - Plasma Physics, Engineering And System Science
National Tsing Hua University (NTHU)
Hsinchu, Taiwan 04.2001 -
Bachelor of Science - Physics
National Dong Hwa University (NDHU)
Hualien, Taiwan 04.2001 -
Skills
Semiconductor dry etch process design
Semiconductor dry etch production optimization and line maintain
Design Of Experiment (DOE) and Machine Learning
Semiconductor structure analysis: TEM, SEM, XPS and SIMS
CDSEM monitor recipe set up
COMSOL and Plasma simulation development
Analytical thinking, problem solving and trouble shooting
Dry etcher equipment optimization
Timeline
Deputy Technical Manager
Hitachi High-Tech Taiwan Corporation
02.2023 - Current
Principal Engineer
Taiwan Semiconductor Manufacturing Company (TSMC)
09.2012 - 01.2023
Ph.D. - Energy-Thermofluids, Mechanical Engineering
National Chiao Tung University (NCTU)
04.2001 -
M.D. - Plasma Physics, Engineering And System Science
National Tsing Hua University (NTHU)
04.2001 -
Bachelor of Science - Physics
National Dong Hwa University (NDHU)
04.2001 -
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