Summary
Overview
Work History
Education
Skills
Accomplishments
Timeline
KEY ACHIEVEMENT
Generic
WEI-LUN GAO

WEI-LUN GAO

Senior Photolithography Equipment Engineer
Hsinchu,HSQ

Summary

Photolithography Equipment Engineer with 6+ years of experience supporting ASML PAS5500 systems in a high-volume semiconductor fab. Skilled in preventive & corrective maintenance, troubleshooting, equipment recovery, RCA, and reliability improvement.

Overview

2
2
Languages
7
7
years of professional experience

Work History

Senior Photolithography Equipment Engineer

Vanguard International Semiconductor (VIS)
01.2020 - Current
  • Maintain and support ASML PAS5500 lithography systems.
  • Perform preventive maintenance (PM) and corrective maintenance (CM).
  • Diagnose equipment issues using alarms and system diagnostics.
  • Recover equipment through calibration, adjustment, and module replacement.
  • Conduct Root Cause Analysis (RCA) and implement corrective actions.
  • Partner with ASML Customer Support Engineers and process teams.

Education

Bachelor of Engineering -

National Formosa University

Skills

ASML PAS5500 expertise

PM

Technical troubleshooting

Equipment Recovery

Equipment Reliability

Cross-functional Collaboration

Accomplishments

1.CIT Gold Award – FAB1 Continuous Improvement Project

2.Minimized rework rate to an all-time low from 0.4%>0.18%

Timeline

Senior Photolithography Equipment Engineer

Vanguard International Semiconductor (VIS)
01.2020 - Current

Bachelor of Engineering -

National Formosa University

KEY ACHIEVEMENT

CIT Gold Award — Recognized for continuous improvement and equipment reliability enhancement.
WEI-LUN GAOSenior Photolithography Equipment Engineer