Yi-Sheng Hsiao

Project Leader, Mask Inspection and Cleaning Tools

• Project leader of mask inspection and mask clean tool, that manage a team to improve the particle capture rate and tool availability
• Conducted regular equipment maintenance, troubleshooting, and abnormal analysis, ensuring efficient processing with mask inspection tools.
• Collaborated with headquarters to improve the particle capture rate from 75% to over 95% on a new EUV mask metrology tool.
• Achieved a reduction in fall-on-hit rate from 1 per month to 0 over 12 months and improved tool availability from 85% to 98%.
• Evaluated the overall performance of new equipment, successfully integrating those that passed evaluation into the production line with mask inspection tools.
• Worked with headquarters to develop an EUV mask cleaning tool.
• Reduce the mean time to repair masks by 6 times.
• Optimized the recipe for the EUV mask cleaning tool, resulting in a 50% reduction in costs.
• Decreased the scan failure rate of the EUV reticle backside inspection tool from 30% to 10%.
• Collaborated with the IT team to plan, maintain, develop, and optimize automation functions for the metrology tool.
• Managed equipment installation and retrofitting, enhancing productivity through upgrades and new equipment development.
• Installed equipment including X8-Ultra, BX100, DP200, Purge Rack, and NXE 3600D.

Cost Savings Initiatives:

• Clean parts for the mask cleaning tool cost $6M/year.
• Action: Reduced clean parts rotation degree from 12 to 6.
• Result: Achieved cost savings of 50% ($NT 3M/year).
  
• Extended the calibration parts' lifespan significantly.
• Action: Defined repair positions during repair procedure.
• Result: Extended auto calibration parts' lifespan by up to 10 times.

Systems Development and skills:

• Built defense systems for EUV tool part health, including sorting tools for EUV pellicle POD and auto-mapping systems.
• Established, managed, and authored SOPs for equipment, enhancing operational sequences to improve production efficiency.
• Demonstrated proficiency in basic operations and troubleshooting skills for the EUV scanner, effectively handling operational tasks and conducting error code analysis.

Publications and Contributions:

• Published 16 trade secrets.
• Actively participated in project meetings, contributing engineering expertise to ensure successful project completion.
• Optimized production processes by identifying bottlenecks and implementing innovative solutions.
• Championed energy-saving initiatives, leading efforts to replace outdated systems with more efficient alternatives.
• Conducted lifecycle analysis on existing equipment, determining replacement timelines based on performance metrics and budget considerations.

Maintenance and Mentorship:

• Revamped preventative maintenance programs to reduce unscheduled downtime and extend asset lifespan.
• Mentored junior engineers on best practices in equipment management and troubleshooting, fostering professional growth within the team.
• Implemented root cause analysis techniques to identify recurring equipment performance issues and develop targeted solutions for improvement.

Collaboration and Expansion:

• Collaborated with vendors to customize machinery to meet unique operational requirements, ensuring seamless integration into facility operations.
• Played a key role in plant expansion projects, contributing to the successful installation and commissioning of new production lines.
• Promoted data-driven decision-making within the engineering team, utilizing analytics tools to monitor equipment performance and identify improvement opportunities.
• Increased equipment efficiency through regular maintenance schedules and timely repairs.

Training and Safety:

• Developed comprehensive training materials for operators, fostering a culture of continuous learning and skill development.
• Enhanced design and functionality of existing equipment to align with operational needs.
• Reinforced equipment safety standards and fostered policies to enhance operations while supporting environmental, health, and safety guidelines.
• Conducted pre-construction, quality and safety management, constructability reviews, start-up, and commissioning.
• Developed automated monitoring functions for use on EUV mask metrology tools.
• Drove reliability and profitability through modifications to the fan filter unit flow system.

• Stray light analysis and suppression to 0.01% in optical system
• Micro-spectrometers MEMS grating defect analysis
• Training technicians to implement manufacture Czerny–Turner (CT) Spectrometer
• CT Spectrometer rework and defect analysis.
• Developed custom optical models using industry-standard software tools, enabling accurate simulations and predictions of system performance.
• Solved challenging technical issues within aggressive deadlines by leveraging strong problem-solving skills and deep understanding of optics principles.

• Camera flare ghost analysis and optimize the optical system
• Optical lens manufacturing tolerances analysis
• Camera lens high volume manufacturing analysis and troubleshooting.
• Designed highly efficient illumination systems using advanced non-imaging optics methodologies, resulting in improved product quality and customer satisfaction.
• Managed optical engineering projects effectively by developing detailed project plans, allocating resources strategically, and tracking progress to ensure timely completion.